Table 2 Summary of the self-assembled droplets on GaAs (211)B, (411)B, (511)B, (711)B, (811)B, and (911)B
S | DA (nm) | ||||||
|---|---|---|---|---|---|---|---|
2 | 3 | 4 | 6 | 9 | 12 | ||
Average height [nm] | (211)B | 22.5 | 31.1 | 44.9 | 52.5 | 67.7 | 71.1 |
(411)B | 22.7 | 30.1 | 44.9 | 54.5 | 69.3 | 76.8 | |
(511)B | 22.2 | 31.2 | 44.1 | 53.6 | 66.0 | 76.7 | |
(711)B | 22.6 | 33 | 47.4 | 56 | 70.8 | 77.3 | |
(811)B | 22.8 | 30.5 | 44.5 | 52.7 | 65.5 | 74.6 | |
(911)B | 22.3 | 30.5 | 44.5 | 52.7 | 65.5 | 74.6 | |
Lateral diameter [nm] | (211)B | 86.5 | 106.5 | 142.4 | 186.2 | 248.8 | 276.8 |
(411)B | 89.8 | 108.1 | 168.6 | 214.2 | 253.2 | 298.7 | |
(511)B | 85.1 | 106.5 | 149.9 | 189.2 | 258.2 | 323.2 | |
(711)B | 87.1 | 108.9 | 150.4 | 222 | 299 | 314.5 | |
(811)B | 82.2 | 105.3 | 173.7 | 187.2 | 292.8 | 320 | |
(911)B | 81.3 | 106.4 | 155.8 | 213.2 | 267 | 304.2 | |
Density [×108 cm-2] | (211)B | 320 | 100 | 39 | 16 | 6.1 | 4.2 |
(411)B | 320 | 108 | 36 | 15 | 6.9 | 3.3 | |
(511)B | 320 | 110 | 36 | 15 | 6.6 | 3.1 | |
(711)B | 320 | 96 | 28 | 13 | 3.9 | 2.8 | |
(811)B | 304 | 108 | 39 | 16 | 4.9 | 2.9 | |
(911)B | 320 | 112 | 33 | 15 | 5.3 | 2.8 | |
Rq [nm] | (211)B | 6.22 | 11.63 | 15.79 | 20.76 | 24.37 | 19.95 |
(411)B | 6.64 | 10.63 | 16.51 | 21.48 | 25.54 | 21.94 | |
(511)B | 5.88 | 11.21 | 15.32 | 21.34 | 21.71 | 21.14 | |
(711)B | 6.97 | 11.90 | 15.50 | 21.07 | 21.51 | 18.31 | |
(811)B | 6.68 | 10.80 | 17.10 | 21.32 | 22.13 | 20.09 | |
(911)B | 6.80 | 10.74 | 16.44 | 20.50 | 24.62 | 18.30 | |