Figure 3
AFM images of Xe + ion beam-eroded Si surfaces for E ion = 1,200 eV, j ion = 300 μ A/cm2 and ion incidence angle of α ion = 75° for increasing fluences. (a) ϕ = 1.12 × 1017 cm-2, (b) 5.62 × 1017 cm-2, (c) 1.12×1018 cm-2, (d) 3.37 × 1018 cm-2, and (e) 1.35 × 1019 cm-2. The image size is 1 × 1 μ m2 (a to e) and 10 × 10 μ m2 for the zooming of the 1.35 × 1019 cm-2 sample (f). The different height scales of the images are specified in each image. The white arrow indicates the projection of the ion beam direction.