Table 1 Binding energies (in eV) of the XPS peaks and VBM for GaN, AlN, GaN/AlN, and AlN/GaN samples
Sample | State | Binding energy(eV) | |
---|---|---|---|
GaN | Ga 3d | 19.70 ± 0.03 | Ga-N |
20.70 ± 0.03 | N2s | ||
VBM | 2.06 ± 0.03 | ||
AlN | Al 2p | 73.85 ± 0.01 | Al-N |
75.05 ± 0.01 | Al-O | ||
VBM | 2.74 ± 0.09 | ||
GaN/AlN | Al 2p | 73.36 ± 0.01 | Al-N |
Ga 3d | 18.56 ± 0.03 | Ga-N | |
19.96 ± 0.03 | N2s | ||
AlN/GaN | Al 2p | 73.43 ± 0.01 | Al-N |
74.63 ± 0.01 | Al-O | ||
Ga 3d | 19.23 ± 0.03 | Ga-N | |
20.23 ± 0.03 | N2s |