The fitted narrow-scan spectra. (a) Ba 3d, (b) Ti 2p, (c) O 1 s, and (d) F 1 s peaks for each BTO film: (1) as-deposited BTO, (2) BTO etched with SF6/O2/Ar (75/5/10) plasma, and (3) etched BTO after post-annealing treatment. Red solid lines represent the experimental results, black solid lines represent the fitted results after subtracting the Shirley-type background, and dashed peaks in blue, violet, green, and orange are sub-peaks fitted using PHI MultiPakTM software. The peak positions of the Ba 3d, Ti 2p, O 1 s, and F 1 s are the average peak positions for the corresponding sub-peaks. The broken lines indicate the approximate chemical shifts.