Account

Table 1 Thicknesses estimated by fitting of the spectroscopic ellipsometry measurements of Si-QDSLs

From: Investigation of hydrogen plasma treatment for reducing defects in silicon quantum dot superlattice structure with amorphous silicon carbide matrix

Parameters	300°C	400°C	500°C	600°C
MSE	11.56	12.22	13.37	13.30
T_s (nm)	33.1	11.5	15.2	6.5
T (nm)	167.7	212.8	224.7	246.1

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