Account

Table 1 Selected bond distances (in Å) of all species for SiCl ₄ half-reaction

From: Stepwise mechanism and H₂O-assisted hydrolysis in atomic layer deposition of SiO₂ without a catalyst

Species	Si-O	O-H	Si-Cl	H-Cl
Im1^A1	2.01	1.03	2.11	2.62
TS1^A1	1.83	1.08	2.24	2.83
Im2^A1	1.79	1.13	2.24	3.21
TS2^A1	1.77	1.02	2.94	2.01
Im3^A1	1.62	4.86	4.88	1.29
P^A1	2.95	0.97	2.05	3.81
TS1^A2	2.10	1.00	2.11	2.95
Im1^A2	1.83	1.02	2.27	2.76
TS2^A2	1.79	1.14	2.50	1.65
Im2^A2	1.62	3.44	4.02	1.29

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