Figure 7From: Atomic layer deposition for fabrication of HfO2/Al2O3 thin films with high laser-induced damage thresholds SEM images of Al 2 O 3 thin film damage morphology. (a) Damage spot. (b, c) Magnified image of the bottom for the damage spot with different magnification levels. (d) Surface morphology of the Al2O3 thin film.Back to article page