RDF stimulation result and magnitudes of
SS. (a) The RDF simulation result of bulk FinFET devices with respect to different fin angles. The magnitude of σV
th is getting larger when the fin angle is getting smaller. (b) The magnitude of σDIBL versus the fin angle. The magnitude of σDIBL increases when the fin angle decreases owing to the wider bottom-fin width. (c) The magnitude of σSS versus the fin angle.