Figure 6From: The function of a 60-nm-thick AlN buffer layer in n-ZnO/AlN/p-Si(111) XPS narrow scans of ZnO/AlN/Si heterojunction. (a) XPS narrow scans of Al 2p3/2 and Si 2 s at AlN/Si interface; (b) XPS narrow scans of Al 2p3/2 and VBM of bulk AlN; (c) XPS narrow scans of Al 2p3/2 and Zn 2p3/2 at ZnO/AlN interface; (d) XPS narrow scans of Zn 2p3/2 and VBM of bulk ZnO on an AlN buffer layer.Back to article page