Figure 9From: Nano-oxide thin films deposited via atomic layer deposition on microchannel plates XPS spectra of ALD-ZnO:Al 2 O 3 /Al 2 O 3 . XPS spectra of ALD-ZnO:Al2O3/Al2O3 (A) as-deposited, first etching and second etching, and the peak shift before and second etching of (B) Al 2p and (C) O 1 s.Back to article page