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Table 1 Summary of the average height, lateral diameter, density, and RMS surface roughness of the self-assembled Au droplets on various GaAs surfaces

From: Observation of Shape, Configuration, and Density of Au Nanoparticles on Various GaAs Surfaces via Deposition Amount, Annealing Temperature, and Dwelling Time

 

I

T d

150

450

900

1800

3600

Average height (AH) (nm)

(100)

23.5

26.5

28.8

32.7

32.8

(110)

27.5

31.2

32.4

34.3

34.7

(111)

27.8

32.9

33.5

34.8

35.5

Lateral diameter (LD) (nm)

(100)

88.6

107.9

114.3

121.2

121.6

(110)

92.7

119.1

120.6

126.4

125.1

(111)

95.3

123.8

125.2

127

125.5

Average density (AD) (×1010 cm−2)

(100)

1.6

1.48

1.38

1.04

0.98

(110)

1.42

1.12

1.08

0.96

0.67

(111)

1.36

1.04

1.02

0.92

0.57

RMS roughness (nm)

(100)

6.6

8.5

8.6

10.1

10.5

(110)

8.6

9.4

9.8

13.1

12.9

(111)

8.8

10.6

10.6

13.7

13.5

  1. Samples were fabricated by the variation of dwelling time between 150 and 450 s at 550 °C. Data were obtained by the measurement of samples more than 100. The measurement error can be within ±5 %
  2. I index of surfaces, Td dwelling time (s)
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