Fig. 1From: Novel 14-nm Scallop-Shaped FinFETs (S-FinFETs) on Bulk-Si SubstrateSchematic illustrations of S-FinFET design and channel control capability. a Design diagrams of device structure and process integration flow for S-FinFETs; b channel cross-sectional views and TCAD simulated channel leakage density mapping images for nanowire FET, normal FinFET, and S-FinFETBack to article page