Open Access

Erratum to: Optical properties and bandgap evolution of ALD HfSiOxfilms

  • Wen Yang1,
  • Michael Fronk2,
  • Yang Geng1,
  • Lin Chen1Email author,
  • Qing-Qing Sun1Email author,
  • Ovidiu D. Gordan2,
  • Peng Zhou1,
  • Dietrich R. T. Zahn2 and
  • David Wei Zhang1
Nanoscale Research Letters201510:378

https://doi.org/10.1186/s11671-015-1079-9

Received: 3 September 2015

Accepted: 16 September 2015

Published: 29 September 2015

The original article was published in Nanoscale Research Letters 2015 10:32

The authors of Nanoscale Research Letters 2015, 10:32 (DOI https://doi.org/10.1186/s11671-014-0724-z) [1] omitted to acknowledge that all ellipsometric data discussed in the article, including those displayed in Figure 1, were recorded in the laboratory of the Semiconductor Physics Group, Institut für Experimentelle Physik, Universitāt Leipzig, with the active involvement and under the guidance of Tammo Böntgen, Rüdiger Schmidt-Grund, and Marius Grundmann.

Notes

Declarations

Open AccessThis article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

Authors’ Affiliations

(1)
Institute of Advanced Nanodevices, School of Microelectronics, Fudan University
(2)
Semiconductor Physics, Technische Universität Chemnitz

Reference

  1. Yang W, Fronk M, Geng Y, Chen L, Sun QQ, Gordan OD, et al. Optical properties and bandgap evolution of ALD HfSiOxfilms. Nanoscale Res Lett. 2015;10:32.View ArticleGoogle Scholar

Copyright

© Yang et al. 2015