Table 3 XPS core-level binding energy values (eV) for samples studied
| Sample ID | O 1s | Si 2p | Zr 3d5/2 | Zr 3d3/2 | Ti 2p3/2 | Ti 2p1/2 |
|---|---|---|---|---|---|---|
| SiO2 | 532.90 | 103.52 | – | – | – | – |
| TiZrSi1 | 530.5 | 103.6 | 183.3 | 185.6 | 459.6 | 465.4 |
| 533.2 | ||||||
| TiZrSi2 | 530.5 | 103.7 | 183.1 | 185.4 | 459.3 | 465.0 |
| 533.0 |