Fig. 5
From: Temperature-Dependent Nanofabrication on Silicon by Friction-Induced Selective Etching

Surface roughness of Si plotted as a function of etching temperature. The etching time was 5 min
From: Temperature-Dependent Nanofabrication on Silicon by Friction-Induced Selective Etching
Surface roughness of Si plotted as a function of etching temperature. The etching time was 5 min