Fig. 3
From: Droplet etching of deep nanoholes for filling with self-aligned complex quantum structures
a AFM image of an AlGaAs surface with uniform nanoholes after LDE at T = 640 °C, θ = 2.0 ML, and F As < 10 −7 Torr. b AFM image of an AlGaAs surface with bimodal nanoholes after LDE at T = 640 °C, θ = 2.4 ML, and F As < 10 −7 Torr. c Phase diagram of uniform or bimodal hole generation dependent on process temperature and Al coverage. Green circlesindicate uniform and red squares bimodal holes. As a guide to the eye, we drew a dashed line between the red squares and green circles