Fig. 6

a Room temperature photoluminescence of Si QDs/SiO2 multilayers on flat and nano-patterned substrates under the excitation of He–Cd laser (325 nm). b Integrated PL intensity of samples. c Reflectance at 820 nm of different samples
a Room temperature photoluminescence of Si QDs/SiO2 multilayers on flat and nano-patterned substrates under the excitation of He–Cd laser (325 nm). b Integrated PL intensity of samples. c Reflectance at 820 nm of different samples