Fig. 5From: On the Crystal Structural Control of Sputtered TiO2 Thin Films a, b Plane-view TEM images and electron diffraction pattern, respectively, at the surface region of TiO2 films with a thickness of 500 nm; c, d Plane-view TEM images and electron diffraction pattern near the substrate of a TiO2 film with a thickness of 500 nm, respectivelyBack to article page