Fig. 2From: Porous NASICON-Type Li3Fe2(PO4)3 Thin Film Deposited by RF Sputtering as Cathode Material for Li-Ion Microbatteries a as-deposited Li3Fe2(PO4)3 with b profilometry analysis, low (c) and high magnification (d) SEM images of porous Li3Fe2(PO4)3 deposited by RF sputtering after annealing treatmentBack to article page