Fig. 3From: Composition Analysis of III-Nitrides at the Nanometer Scale: Comparison of Energy Dispersive X-ray Spectroscopy and Atom Probe TomographyAPT analysis. a 3D reconstruction of the sample tip evaporated including seven periods of the stack. b Zoom over the black rectangle marked in a. c Variation along the growth axis of the Ga/(Ga+Al) and Al/(Ga+Al) ratios for the volume shown in b Back to article page