Fig. 6
From: A Novel Nanofabrication Technique of Silicon-Based Nanostructures
Fabrication of highly controlled periodic silicon nanoline arrays. a A schematic illustration for the fabrication of silicon nanoline structures. b Cross-sectional views of etched SiO2 nanolines using α-Si mask. c–e Top-down SEM images of parallel silicon nanoline arrays with smooth sidewalls showing 40-, 30-, and 20-nm CD, respectively. f Cross-sectional SEM images of e with a high aspect ratio of 5:1