Table 1 Summary of roughness of hybrid thin films
Dielectric materials | No modified layer | PMMA-modified | COC-modified | |||
---|---|---|---|---|---|---|
Ra roughness (nm) | Thickness (nm) | Ra roughness (nm) | Thickness (nm) | Ra roughness (nm) | Thickness (nm) | |
IB0 | 0.319 | 352 | 0.262 | 375 | 0.233 | 381 |
IB2 | 1.836 | 358 | 1.301 | 377 | 1.159 | 380 |
IB5 | 3.761 | 363 | 2.484 | 387 | 1.535 | 379 |
IB8 | 5.390 | 354 | 3.187 | 370 | 2.189 | 374 |
IB10 | 8.324 | 365 | 3.597 | 389 | 2.489 | 383 |
IB12 | 9.007 | 356 | 4.340 | 373 | 3.229 | 380 |