Fig. 1From: Gate-Controlled WSe2 Transistors Using a Buried Triple-Gate Structure a–d Manufacturing process of the LOCOS BTG structure. e Schematic cross-section and bird’s-eye view of a WSe2 device. f Scanning electron microscopy cross-section and surface micrograph (at an angle of 80° from the top view) of the LOCOS BTG structureBack to article page