Fig. 1From: XPS Depth Profile Analysis of Zn3N2 Thin Films Grown at Different N2/Ar Gas Flow Rates by RF Magnetron SputteringAFM images (2 × 2 μm2 size) of samples grown at N2/Ar gas flow rate of a 0.22, b 0.40, c 0.60, d 0.80, and e 1.0Back to article page