XPS Depth Profile Analysis of Zn3N2 Thin Films Grown at Different N2/Ar Gas Flow Rates by RF Magnetron Sputtering

Table 1 Growth condition for zinc nitride thin films grown by RF magnetron sputtering

Sample #	Growth temperature (°C)	Ar flow rate (SCCM)	N₂ flow rate (SCCM)	N₂/Ar flow rate ratio
1	300	9	2	0.22
2	300	10	4	0.40
3	300	10	6	0.60
4	300	10	8	0.80
5	300	10	10	1.0