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Fig. 1 | Nanoscale Research Letters

Fig. 1

From: On-Demand Fabrication of Si/SiO2 Nanowire Arrays by Nanosphere Lithography and Subsequent Thermal Oxidation

Fig. 1

A schematic diagram of Si/SiO2 NW arrays fabrication. a A self-assembled colloidal monolayer was formed. b Non-close-packed colloidal monolayer was obtained after argon plasma treatment. c A Ti/Au film was evaporated on top, and the colloidal monolayer was peeled off by ultrasonication in toluene. d Si NW arrays etched via MACE using gold mesh as catalysts. e Gold mesh was dissolved in aqua regia and Si/SiO2 core-shell cylindrical structure was obtained by the following thermal oxidation process

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