Fig. 5From: Effects of Annealing Ambient on the Characteristics of LaAlO3 Films Grown by Atomic Layer DepositionBand alignments of LaAlO3/Si structures. a Schematic of band energy alignment diagram for a LaAlO3/Si structure; XPS core level spectra of b Si 2p and valence band for bulk clean silicon, c Al 2p and valence band for 10-nm LaAlO3 films, and d Si 2p and Al 2p for 4-nm LaAlO3 films on p-Si(100)Back to article page