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Table 2 Assignment of Zr-O and Si-O related vibration bands

From: Effect of Ge Content on the Formation of Ge Nanoclusters in Magnetron-Sputtered GeZrOx-Based Structures

Type of bonding

Spectral position, cm−1 (vibration type)

Reference

Zr-O monoclinic

350,425,520,595,740 (as-deposited) (20 °C)

335,410,505,575,740 (shoulder) (673 °C)

325,400,505,575 (910 °C)

[30]

Zr-O tetragonal

485, 615

Zr-O cubic

450, 485, 615

Si-O-Si

470 (rocking) (TO1), 820 (bending) (TO2)

1086 (asymmetric) (TO3)

[33]

Si-O1−

970 (terminal Si-O groups produced by network disruption)

[34]

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