Fig. 6From: Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition a Low-magnification TEM image of Al2O3/BP sample fabricated at 200 °C. b High-resolution TEM image of Al2O3/BP sample, same scanned region marked by a red square in a. The thickness of Al2O3 and PO x layer is 10.7 and 6.1 nm, respectively. c Selected area electron diffraction (SAED) pattern for the BP crystalline in b Back to article page