Table 1 Parameters used in the simulations

Workpiece size (l_W × h_W × w)

100 × 50 × 3 nm³

Number of silicon atoms

72 × 10⁴

Tool size (l_T × h_T × w)

25 × 25 × 3 nm³

Number of carbon atoms

26 × 10⁴

Radius of cutting edge

8 nm

Rake and clearance angles of tool

−7° and 7°

Cutting depth

6 nm

Cutting speed

200 m/s

Cutting direction

(100)[0–10] and (100)[0-1-1]

(110)[−110] and (110)[00–1]

(111)[−101] and (111)[−12-1]

Temperature

293 K

Time step

2 fs