Fig. 10
Cross-sectional views of the subsurface deformation when nano-cutting along the \( \left[1\overline{2}1\right] \) direction on the (111) plane. a On the \( \left[\overline{1}01\right] \) germanium surface, passing through the middle of the tool. b On the \( \left(1\overline{2}1\right) \) plane, passing through E 1 . c On the \( \left(1\overline{2}1\right) \) plane, passing through E 2 . d On the \( \left(1\overline{2}1\right) \) plane, passing through E 3