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Table 3 The ΔE V values of the Al2O3/Zn0.8Al0.2O heterojunction with Al2O3 thickness of 3–5 nm

From: Band Offset Measurements in Atomic-Layer-Deposited Al2O3/Zn0.8Al0.2O Heterojunction Studied by X-ray Photoelectron Spectroscopy

ΔE V

3 nm Al2O3/Zn0.8Al0.2O

4 nm Al2O3/Zn0.8Al0.2O

5 nm Al2O3/Zn0.8Al0.2O

Zn 2p 3/2

Zn 2p 1/2

Zn 2p 3/2

Zn 2p 1/2

Zn 2p 3/2

Zn 2p 1/2

Al 2p

0.9

0.84

0.87

0.91

0.89

0.32

O 1 s

0.87

0.81

0.85

0.89

0.9

0.33

  1. The calculation does not include the italic numbers

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