Fig. 1From: Batch Fabrication of Broadband Metallic Planar Microlenses and Their Arrays Combining Nanosphere Self-Assembly with Conventional PhotolithographySchematic of the main process steps for fabricating the microlenses and their arrays. a Spin coating of monolayer PS nanospheres. b size shrinkage of PS nanospheres. c Au deposition. d removal of PS nanospheres. e Cr deposition. f transfer of microlenses patterns onto photoresist. g wet etching. h removal of photoresistBack to article page