Table 2 Average values of structure height and periodicity in in-plane direction and the shrinkage factors
Structures | Height | Periodicity in in-plane direction |
|---|---|---|
SU-8 template | 1115 nm | 589 nm |
3D ZnO structure (6 cycles) | 935 nm | 495 nm |
Shrinkage factor | 16.1% | 16.0% |