Table 2 Performance summary of the new charge splitting in situ recorder (CSIR) for monitoring plasma charging damage in advanced FinFETs BEOL process
PID detector | Readings | Charge polarity separation | Read-time feedback | Sensitivity control | AR |
|---|---|---|---|---|---|
Conventional | TBD | No | No | Antenna ratio (AR) | >103 |
CSIR | QFG | Yes | Yes | Coupling ratio (CR) | ~102 |