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Table 2 Performance summary of the new charge splitting in situ recorder (CSIR) for monitoring plasma charging damage in advanced FinFETs BEOL process

From: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes

PID detector Readings Charge polarity separation Read-time feedback Sensitivity control AR
Conventional TBD No No Antenna ratio (AR) >103
CSIR QFG Yes Yes Coupling ratio (CR) ~102