Effects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al2O3/ZnO Nanolaminates

Table 1 The parameters of samples with different bilayer thicknesses

Sample	Layer thickness (nm)		Cycles		The number of bilayer
Sample	Al₂O₃	ZnO	Al₂O₃	ZnO	The number of bilayer
2 (25/25 nm)	25	25	250	150	2
5 (10/10 nm)	10	10	100	60	5
10 (5/5 nm)	5	5	50	30	10
25 (2/2 nm)	2	2	20	12	25
50 (1/1 nm)	1	1	10	6	50