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Table 3 The growth rates of samples with different bilayer thicknesses

From: Effects of Bilayer Thickness on the Morphological, Optical, and Electrical Properties of Al₂O₃/ZnO Nanolaminates

Sample	Growth rate (Å/cycle) cycles
Sample	Al₂O_3TEM	ZnO_TEM	Al₂O_3SE	ZnO_SE
2 (25/25 nm)	0.89	1.49	0.87	1.44
5 (10/10 nm)	–	–	0.88	1.47
10 (5/5 nm)	0.88	1.46	0.87	1.46
25 (2/2 nm)	–	–	0.81	1.35
50 (1/1 nm)	0.76	1.26	0.75	1.25

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