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Table 1 Comparison of I-V characteristics of a-IGZO-based TFT device with CL-ES structure and BCE structure

From: Enhancement of a-IGZO TFT Device Performance Using a Clean Interface Process via Etch-Stopper Nano-layers

Item

Unit

CL-ES

BCE

V th_Avg

V

− 0.85

+ 0.50

V th_Range

V

0.72

2.14

Subthreshold voltage swing

V/dec.

0.18

0.77

Ion/Ioff ratio

3.82 × 106

2.62 × 106

Mobility

cm2/V s

8.05

6.03

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