Fig. 9From: Reduced Contact Resistance Between Metal and n-Ge by Insertion of ZnO with Argon Plasma Treatmenta I–V curves at Al/ZnO(2 nm)/n+-Ge with different d with ZnO treated using Ar plasma. b Rtot versus d curves for the CTLM with Al/ZnO(2 nm)/n+-Ge contactsBack to article page