Table 1 Comparison of the performances of nanoscale vacuum channel transistors
Device Types | Channel width (nm) | Operating voltage (V) | Working current (nA) | On/off ratio | Gate current (nA) | Stability (S) |
|---|---|---|---|---|---|---|
Vertical graphene-based vacuum transistor [12] | ~ 300 | < 10 | 10 | 106 | ~ 106 | – |
Planar back-gate vacuum channel transistor [9] | ~ 150 | < 20 | 4 × 104 | 106 | – | – |
Gate-all-around vacuum channel transistor [8] | ~ 50 | < 5 | 1000 | 103 | < 1 | – |
This paper | ~ 90 | < 20 | 200 | 102 | < 0.5 | 1000 |