Fig. 7
From: One-Step Mask-Based Diffraction Lithography for the Fabrication of 3D Suspended Structures
Suspended SU-8 meshes and pyrolytic carbon meshes. a Suspended SU-8 beams. b, c Suspended SU-8 meshes with supporting pillars. d Suspended carbon beams, where great strains remained in the carbon structures and cracks occurred at the bottom of the pillar. e, f Suspended carbon meshes. g Free-standing carbon mesh after pyrolysis. h Magnification of the free-standing carbon mesh. i A 12 mm × 20 mm free-standing carbon mesh, which presents well flexibility and transparency. The scale bars are 100 μm