Fig. 3From: Measurement and Evaluation of Local Surface Temperature Induced by Irradiation of Nanoscaled or Microscaled Electron BeamsSEM micrographs of [B(10 nm)/Mg(15 nm)]N = 4 multilayers on SiC substrate annealed with HIEB in a SEM with the annealing currents of a 0 mA, b 9.9 mA, c 10.7 mA, and d 12.8 mA, respectivelyBack to article page