Measurement and Evaluation of Local Surface Temperature Induced by Irradiation of Nanoscaled or Microscaled Electron Beams

Table 2 Annealing parameters and measured properties of Mg-B thin films

Sample No	Annealing current I (mA)	Energy density E (J/cm²)	Critical point T_c (K)	Mean roughness (nm)
A	0	0	–	2.5
B	9.9	52.3	35.1	3.1
C	10.7	56.5	35.8	3.6
D	12.8	67.6	36.3	7.5