Fig. 7
Grating lines fabricated at the x−y plane with respect to different relative laser focus distance Δz. Material: E-shell 300. A writing speed of 7 μm/s was applied. a Measured line width and fitted curve with respect to different Δz. The figure in the lower right corner is a reconstruction of the ellipse corresponding to the fitted line. b Grating lines fabricated with the laser intensity of I=0.85 kW/ μm2 (with the laser power P=1.84 mW). The relative laser focus distance is Δz=50 nm. c Grating lines fabricated with the laser intensity of I=0.78 kW/ μm2 (with the laser power P=1.69 mW). The relative laser focus distance is Δz=50 nm