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Table 3 Parameters of O2, FG, and two-step annealing processes

From: Enhanced Si Passivation and PERC Solar Cell Efficiency by Atomic Layer Deposited Aluminum Oxide with Two-step Post Annealing

 

O2-600

FG-450

Two-step

Step 1

Step 2

Annealing gas

O2

5% H2, 95% N2

O2

FG

Temperature (°C)

600

450

600

450

Time (min)

20

20

10

10

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