Table 1 Details of experimental samples for ALD

Sample A

Uncoated

Samples A, B, C, D, and E to confirm the best thickness of deposition layer

Sample B

Coated 4-nm ALD Al₂O₃

Sample C

Coated 6-nm ALD Al₂O₃

Sample D

Coated 8-nm ALD Al₂O₃

Sample E

Coated 10-nm ALD Al₂O₃

Sample F

Coated 60-nm ALD Al₂O₃

Extending precursors model

Samples F and G to confirm which deposition model is better

Sample G

Coated 60-nm ALD Al₂O₃

Stop flow model

Sample H

Half coated 8-nm ALD Al₂O₃

Half no coated