Fig. 1From: Investigation of energy band at atomic layer deposited AZO/β-Ga2O3 (\( \overline{2}01 \)) heterojunctionsHigh resolution XPS spectra for core level and valence band maximum (VBM) of a Ga 2p core level spectrum and VBM from bare β-Ga2O3, b Zn 2p core level spectrum and VBM from thick pure ZnO/β-Ga2O3, c Zn 2p core level spectrum and VBM from thick 5% Al-doped ZnO/β-Ga2O3, and d Zn 2p core level spectrum and VBM from thick 10% Al-doped ZnO/β-Ga2O3Back to article page