Fig. 9From: Scaled-Down c-Si and c-SiGe Wagon-Wheels for the Visualization of the Anisotropy and Selectivity of Wet-Chemical EtchantsEtching of Si spokes: the spoke width decreases gradually, but only after a certain tcrit., the spoke tips start to retract, and the measured retraction lengths can be fitted linearly a.f.o. etching time (gray-shaded area)Back to article page