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Table 2 Potential function parameters used in this study [8]

From: Atomic-Scale Characterization of Slip Deformation and Nanometric Machinability of Single-Crystal 6H-SiC

Details	Si-Si	C-C	Si-C
D_o (eV)	3.24	6	4.36
r_o (Å)	2.232	1.4276	1.79
S	1.842	2.167	1.847
β (Å^-1)	1.4761	2.0099	1.6991
γ	0.114354	0.11233	0.011877
c	2.00494	181.910	273987
d	0.81472	6.28433	180.314
h	0.259	0.5556	0.68
2 μ (Å⁻¹)	0	0	0
R (Å)	2.82	2	2.4
D (Å)	0.14	0.15	0.2

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