Effect of Machining-Induced Subsurface Defects on Dislocation Evolution and Mechanical Properties of Materials via Nano-indentation

Table 4 Young’s modulus of single crystal copper during nano-indentation with subsurface defects

Maximum depth 2 nm	Indentation depth	0.5 nm	1 nm	1.5 nm	Maximum load depth (depth)
Maximum depth 2 nm	Young’s modulus E (GPa)	160.69	160.54	147.46	134.38 (1.8 nm)
Maximum depth 3 nm	Indentation depth	0.5 nm	1 nm	1.5 nm	86.57 (3.1 nm)
	Young’s modulus E (GPa)	162.06	168.51	153.34
	Indentation depth	2 nm	2.5 nm	3 nm
	Young’s modulus E (GPa)	119.40	93.66	83.02